microelectronics

Isihluzo se-CMP

Kwinkqubo ye-CMP, iimveliso ezinoluhlu lwesayizi enkulu ye-particle kufuneka zihluzwe, iinqununu ezisebenzayo kufuneka zigcinwe ukugaya kunye ne-iarge-size particles may scatchthe surface kufuneka isuswe.ln imbono yokusebenza kwesuntswana elingqongqo lokunqunyulwa kombindi wefiter, njengoko amasuntswana amaninzi aguqukayo kufuneka akhululwe ngokunokwenzeka ukuba athintele amasuntswana obungakanani obukhulu.